Burn-Jeng Lin
Burn-Jeng Lin | |
|---|---|
| Born | 1942 Taiwan |
| Occupation | Electrical engineer |
| Years active | 1970–present |
| Known for | Pioneer of immersion lithography technique |
Burn-Jeng Lin (; born 1942) is an electrical engineer from Taiwan.
Education
Lin completed his undergraduate studies in electrical engineering at National Taiwan University in 1963. He then obtained his Ph.D. in the same discipline from Ohio State University in 1970.
Career
Beginning his professional journey at IBM in 1970, Lin was a pioneer of the immersion lithography technique, which gained commercial success during the 1980s. In 1992, he departed IBM to establish Linnovation, Inc., and later joined TSMC in 2000. His contributions earned him the status of IEEE Fellow in 2003, along with similar honors from the SPIE, including the first-ever Frits Zernike Award in 2004. Lin's election to the United States National Academy of Engineering came in 2008, recognizing his leadership in advancing lithography for semiconductor fabrication. Among his accolades are the IEEE Cledo Brunetti Award received in 2009 and the IEEE Jun-ichi Nishizawa Medal awarded in 2013. In 2014, he was inducted into Academia Sinica. Following his retirement from TSMC, Lin took up a faculty position at National Tsing Hua University.